Nikon Launches Innovative DSP-100 Digital Lithography System for Advanced Packaging

Nikon Unveils the DSP-100 Digital Lithography System

Nikon Corporation has announced the launch of its Digital Lithography System, the DSP-100, marking a significant milestone in the world of advanced semiconductor packaging. Orders for this groundbreaking technology began in July 2025 and it is set to be prominently displayed at the upcoming SEMICON West 2025 exhibition.

Introduction to the DSP-100

The DSP-100 is tailored for the increasingly sophisticated demands of semiconductor manufacturing, particularly in advanced packaging applications. Designed to support large substrates of up to 600mm in size, this system offers impressive resolutions at 1.0μm (L/S), ensuring precision in every application. The growing need for high-performance semiconductor devices, especially in data centers driven by the rise of the Internet of Things (IoT) and generative artificial intelligence (AI), has significantly fueled demand for such technology.

Features and Capabilities

One of the standout features of the DSP-100 is its ability to handle large square substrates effectively. This capability translates to a productivity increase that can be as much as nine times when compared to traditional 300mm wafers. Specifically, when working with 100mm-square large packages, the DSP-100 enhances output significantly, making it an invaluable asset for manufacturers looking to maximize efficiency.

In terms of technical specifications, the DSP-100 operates with a light source equivalent to i-line, achieving overlay accuracy of ≤ ±0.3μm. With a valuable throughput rate of 50 panels per hour using 510×515mm substrates, it assures high efficiency in production. Furthermore, the DSP-100 incorporates advanced correction features to address potential substrate warpage and deformation, streamlining production while minimizing costs.

Advanced Maskless Technology

A unique selling point of the DSP-100 is its innovative maskless operation. Unlike traditional lithography systems requiring photomasks, the DSP-100 uses a spatial light modulator (SLM) to directly project circuit patterns onto substrates. This eliminates the constraints associated with photomasks, allowing greater flexibility and streamlining the development process, which significantly shortens lead times and reduces costs for customers.

Sustainability Considerations

Nikon's DSP-100 is not only focused on productivity but also emphasizes sustainability. Its solid-state light sources contribute to minimizing maintenance costs and supporting environmentally friendly manufacturing practices. As manufacturers and industries are increasingly conscious of their environmental impact, this technology is poised to lead the shift towards greener production methods in the semiconductor sector.

Conclusion

The launch of Nikon's DSP-100 Digital Lithography System represents a significant advancement in semiconductor manufacturing technology. With its exceptional capabilities tailored for advanced packaging and a commitment to sustainability and efficiency, the DSP-100 is set to redefine standards in the industry. As we head into SEMICON West 2025, the spotlight will undoubtedly shine brightly on Nikon's latest innovation, paving the way for the future of semiconductor production.

For those interested in the technical details and potential applications of this system, further exploration will be available at SEMICON West, where experts from Nikon will provide insights into how the DSP-100 can transform manufacturing processes in the semiconductor domain.

About Nikon Corporation

Since its inception, Nikon Corporation has been a trailblazer in the field of lithography, constantly innovating with cutting-edge products and technologies. By introducing the DSP-100, Nikon continues to assert its leadership in semiconductor lithography systems, dedicated to serving the evolving needs of the microelectronics manufacturing industry. With over 8,000 semiconductor lithography systems already in operation worldwide, Nikon remains committed to delivering excellence and pushing the boundaries of technology.