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Park Systems Unveils Expanded AFM FX Series for Large Samples

Seoul, South Korea - February 19, 2025 - Park Systems, a world leader in atomic force microscopy (AFM), has showcased its latest range of large sample AFM FX models at SEMICON Korea 2025. Following the notable success of the Park FX200, which debuted at SEMICON West 2024 and gained significant traction across markets in Germany, Japan, and South Korea, the company has introduced the groundbreaking Park FX300. This new device is specifically designed for the analysis of 300 mm wafers and is complemented by the Park FX200 IR and FX300 IR models that integrate infrared spectroscopy, thus pushing the boundaries of large sample AFM technology.

As 300 mm wafers become the industry standard for the semiconductor sector, the Park FX300 is tailored for users who seek high-precision analysis without the complexity associated with fully automated inline systems. It serves as an ideal solution for companies contemplating the implementation of AFM technology before transitioning to mass production. Optimized for both industrial and research applications, the Park FX300 is poised to revolutionize capabilities in quality control and analytical precision across a wide array of AFM techniques.

This system boasts specialized features, including a motorized stage for long-range flatness measurements of copper bumps used in semiconductor post-processing, a rotating stage for accurate sample alignment during wafer packaging, and an off-axis optical system that enhances sample visualization. Additionally, the filtration unit (FFU) ensures a well-controlled and contaminant-free environment, solidifying its status as a premier tool for cleanroom applications.

Moreover, Park Systems has introduced the FX200 IR and FX300 IR models, extending AFM technology into the realm of nanoscopic chemical analysis. By integrating Fourier-transform infrared (FTIR) spectroscopy with AFM, these models utilize photoinitiated force microscopy (PiFM) to facilitate chemical identification with a spatial resolution under 5 nm. This advancement allows researchers and engineers to analyze the chemical composition of nanostructures without damaging wafer surfaces, unlocking new potential for materials characterization across semiconductor, polymer, and life sciences applications.

Designed for small samples up to 200 mm or 300 mm wafers, the FX200 IR and FX300 IR provide high-resolution infrared spectral imaging, delivering unprecedented insights into molecular interactions and material compositions. Their capability to capture information on chemical bonds at ultra-fine scales significantly enhances semiconductor defect analysis, polymer research, and advanced material characterization with unparalleled accuracy.

Building on Park Systems’ philosophy of maximizing efficiency while minimizing manual intervention, the FX Large Sample AFM series enhances usability by offering automatic probe recognition and replacement, a QR code system for probe monitoring, and AI-driven laser alignment for seamless operation. The StepScan™ functionality further boosts efficiency by enabling automated sequential measurements at predefined coordinates, allowing researchers to analyze topography and various properties with minimal manual input. This automation is particularly beneficial in IR applications, where laser alignment can pose substantial challenges, thus making high-resolution chemical analysis more accessible than ever before.

Sang-Joon Cho, Executive Vice President of Park Systems, emphasized the company’s commitment to technological leadership, stating, “Leveraging decades of precision measurement and automation expertise, we have optimized the FX Large Sample AFM series for silicon wafer analysis at the highest levels in both industry and research. The Park FX300 and nano-IR systems redefine the divide between industrial and research AFM applications, providing our customers with the most advanced AFM technology while shaping the future of nanoscience together.”

With these recent innovations, Park Systems continues to strengthen its position as a global leader in atomic force microscopy, delivering cutting-edge solutions to meet the ever-evolving demands of semiconductor research and nanoscience.

About Park Systems Corp. (KOSDAQ 140860)

As a pioneer and leader in nanometrology solutions with its production of the highest quality AFM instruments, Park Systems Corp. has distinguished itself from competitors through its unparalleled commitment to fostering long-lasting professional relationships with researchers and engineers across various scientific fields, including material science, physics, chemistry, life sciences, semiconductors, and data storage. The company's mission is to promote nanoscopic innovations for scientists and engineers to enhance scientific discoveries. Park Systems serves some of the largest semiconductor companies and research universities worldwide, with headquarters in Suwon, Korea, and regional offices in America, Europe, and Asia. For more information, visit www.parksystems.com.