#South Korea #Seoul #Park Systems #AFM Technology #SEMICON

Park Systems Unveils Advanced FX Large Sample AFM Innovations at SEMICON Korea 2025

Park Systems, a leader in atomic force microscopy (AFM) technology, recently announced the extension of its FX Large Sample AFM product line during the SEMICON Korea 2025 event. This new lineup, which builds on the earlier success of the Park FX200—first unveiled at SEMICON West 2024—increases the company’s capabilities in industrial analysis, specifically tailored for 300 mm wafers commonly used in the semiconductor industry.

Overview of the New FX Large Sample Series

The highlight of the launch was the introduction of the Park FX300, engineered for high-precision wafer analysis while ensuring simplicity without the complexities involved in fully automated systems. This model is particularly useful for companies contemplating AFM technology prior to committing to inline manufacturing processes.

The FX300 is tailored for both industrial applications and research, aimed at expanding the scope of analysis and quality control across various AFM techniques, setting new industry standards. The device includes several unique features such as:

• - A sliding mechanism designed for flatness measurements over a wide area of copper pads in post-processing.
• - A rotation unit for precise sample alignment in wafer-level packaging.
• - An off-axis optical system that enhances sample visualization.

Additionally, the Fan Filter Unit (FFU) guarantees a controlled and contamination-free environment, making it perfect for cleanroom applications.

Advancements in Chemical Analysis with AFM

Alongside the FX300, Park Systems also launched the FX200 IR and FX300 IR models, which incorporate infrared spectroscopy into AFM technology. By combining Fourier-transform infrared spectroscopy (FTIR) with AFM, these models enable chemical identification with a spatial resolution of under 5 nanometers using photo-induced force microscopy (PiFM). This innovation allows scientists and engineers to analyze the chemical makeup of nanostructures without compromising wafer surface integrity, significantly advancing material characterization in semiconductor, polymer, and life science sectors.

Both the FX200 IR and FX300 IR are compatible with samples ranging from small sizes up to 200 mm or 300 mm wafers, delivering high-resolution infrared spectral imaging that sheds new light on material composition and molecular interactions. Their ability to capture information about chemical bonds at ultra-fine scales enhances research into semiconductor defects, polymer science, and the characterization of advanced materials with unmatched precision.

User-Centric Innovations for Enhanced Efficiency

The FX Large Sample AFM series exemplifies Park Systems' commitment to maximizing efficiency and minimizing manual intervention. Noteworthy features include:

• - Automatic probe recognition and exchange.
• - A QR code system for tracking probe status.
• - AI-powered laser alignment to streamline operations.

Moreover, the StepScan™ function further boosts efficiency by facilitating automatic sequential measurements at predefined coordinates, allowing researchers to evaluate topology along with electrical, mechanical, and magnetic properties with minimal manual input. This is particularly beneficial in infrared applications, where laser alignment previously posed significant challenges. The new systems completely automate this process, making high-resolution chemical analyses more accessible than ever.

Commitment to Technological Leadership

Dr. Sang-Joon Cho, Executive Vice President of Park Systems, emphasized the company's dedication to maintaining a leadership role in technology advancements. He stated, “We have optimized the FX Large Sample AFM series for top-tier wafer analysis in both industrial and research settings, leveraging Park Systems' decades of expertise in precision measurement and automation. The Park FX300 and the Nano-IR systems redefine the boundaries between industrial and research-oriented AFM applications, providing our customers with the most advanced AFM solutions on the market, and together, we are shaping the future of nanosciences.”

Through these innovative developments, Park Systems cements its status as a global frontrunner in AFM technology, delivering industry-leading solutions tailored to the evolving needs of the semiconductor and nanoscience research sectors.

About Park Systems

Park Systems Corp. (KOSDAQ 140860) is a pioneer and market leader in nanometrology solutions, particularly renowned for its high-quality AFM products. The company stands out for its unwavering commitment to maintaining and nurturing professional relationships with researchers and engineers across various fields, including materials science, physics, chemistry, biosciences, and semiconductor industries. Park Systems is dedicated to advancing nanotechnology innovations for scientists and engineers alike. With a global clientele that includes leading semiconductor companies and research universities, Park Systems is headquartered in Suwon, South Korea, and operates regional offices in America, Europe, and Asia. For more details, visit www.parksystems.com.