#South Korea #Seoul #Park Systems #AFM Technology #SEMICON Korea

Park Systems Launches Enhanced FX Large Sample AFM Series

At the recent SEMICON Korea 2025 event, Park Systems, recognized as a global leader in atomic force microscopy (AFM), has proudly showcased its expanded FX Large Sample AFM series. This series represents not only an upgrade of their existing models but also a significant step for industrial innovation, particularly in the semiconductor industry.

A Leap Forward in Semiconductor Analysis

With the semiconductor industry pivoting towards the standardization of 300 mm wafers, the newly introduced Park FX300 stands out as a high-precision tool tailored for this transition. Unlike fully automated inline systems, the FX300 simplifies the analysis process, allowing companies to engage with AFM technology in a more accessible manner before fully integrating it into their production lines.

In addition to the FX300, the new series includes FX200 IR and FX300 IR models. These are equipped with infrared (IR) spectroscopy that enhance chemical analysis at the nanoscale. By synchronizing Fourier Transform Infrared Spectroscopy (FTIR) with AFM, these systems deliver chemical identification capabilities with remarkable spatial resolution of less than 5 nm. This level of detail is crucial for scientists and engineers conducting semiconductor and polymer evaluations, as it allows for analyses of material composition without compromising the integrity of wafer surfaces.

Key Features Driving Innovation

Park Systems has embedded various specialized features into the FX300 to maximize its efficacy in industrial and research settings. The Sliding Stage, for instance, provides long-range flatness measurements, particularly benefiting copper pads during semiconductor post-processing. Likewise, the Rotation Stage assists with precise alignment of samples during wafer-level packaging, further bolstering the device's functionality.

Moreover, the Off-Axis Optics system significantly enhances visualization capabilities, permitting detailed observation essential for quality control processes.

Another remarkable feature is the Fan Filter Unit (FFU), which maintains a controlled and clean environment essential for sensitive analyses, making these tools particularly suitable for cleanroom applications.

Automation Enhancements

Park Systems' commitment to user-friendly technology shines through in the automated systems of the FX Large Sample AFM series. With features like automated probe recognition and exchange, operational simplicity is prioritized. The introduction of a QR code system facilitates probe status monitoring efficiently.

AI-driven laser alignment further removes manual challenges in the analysis process, particularly in IR applications. The StepScan™ function enhances measurement efficiency by automating sequential analyses at predefined coordinates, thereby minimizing the need for human intervention.

Strategic Intent and Future Vision

Dr. Sang-Joon Cho, Executive Vice President at Park Systems, highlighted the importance of these innovations in advancing industrial and research applications.