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Park Systems Expands FX Large Sample AFM Series

Park Systems, a leader in atomic force microscopy (AFM), has recently unveiled an expanded line of AFM equipment specifically designed for large samples at SEMICON Korea 2025. This new series builds on the success of their previously launched Park FX200 model, which debuted at SEMICON West 2024 and quickly gained popularity in markets across Germany, Japan, and Korea.

The latest addition, the Park FX300, is tailored for 300 mm wafer analysis and is geared towards delivering accurate assessments without the intricacies of fully automated online systems. This makes it an excellent resource for businesses that are contemplating the adoption of AFM technology prior to transitioning to automated production.

One of the standout features of the Park FX300 is its suitability for both industrial and research applications. This innovative model is equipped with advanced capabilities that enhance analysis and quality control across various AFM techniques. Notably, it includes a specialized sliding stage for long-range flatness measurements of copper pads as part of semiconductor post-processing, a rotating stage for precise sample alignment during wafer-level packaging, and an off-axis optics system for improved sample visualization. Furthermore, the integrated fan filter unit (FFU) ensures a controlled, contamination-free environment, making it ideal for cleanroom applications.

In addition to the FX300, Park Systems has introduced the FX200 IR and FX300 IR models. These incorporate infrared spectroscopy (FTIR) into the AFM framework, facilitating chemical analysis at the nanoscale. Utilizing photo-induced force microscopy (PiFM), these systems can identify chemical compositions with a spatial resolution of less than 5 nm, allowing researchers to analyze the chemical makeup of nanoscale structures without damaging wafer surfaces. Such a capability opens up new avenues for material characterization in semiconductor applications, polymers, and life sciences research.

The FX200 IR and FX300 IR models cater to samples that range from small sizes to full 300 mm wafers. They provide high-resolution infrared spectral imaging, which offers unprecedented insights into material composition and molecular interactions. This ability to capture data on chemical bonds at extremely fine scales significantly enhances semiconductor defect analysis, polymer research, and advanced material characterization with unmatched precision.

Designed with the philosophy of enhancing operational efficiency and minimizing manual intervention, the FX Large Sample AFM series includes features such as automated probe recognition and exchange, a QR code system for monitoring probe status, and AI-driven laser alignment for seamless operation. Moreover, the StepScan™ function further boosts efficiency by allowing automated sequential measurements across predefined coordinates. This enables researchers to examine topographical, electrical, mechanical, and magnetic properties with minimal manual involvement, which is particularly crucial for infrared applications where laser alignment can pose significant challenges. By automating this process, high-resolution chemical analysis becomes more accessible than ever before.

Dr. Sang-Joon Cho, Executive Vice President of Park Systems, emphasized the company's commitment to technological leadership: "By leveraging decades of expertise and innovation in precision measurement and automation, we have optimized the FX Large Sample AFM series for wafer-level analysis at the highest standards, serving both industrial and research domains. The Park FX300 and nano-IR systems are redefining the boundaries between industrial and research AFM applications, providing our clients with the most advanced AFM available, shaping the future of nanoscience together."

With these latest advancements, Park Systems continues to solidify its reputation as a global leader in atomic force microscopy, delivering cutting-edge solutions that meet the evolving demands of semiconductor research and nanoscience.

About Park Systems Corp.

Founded in Suwon, South Korea, Park Systems Corp. (KOSDAQ 140860) stands at the forefront of nanometrology, specializing in the manufacture of high-quality atomic force microscopes (AFM). The company is recognized not only for its innovative technologies but also for its unwavering commitment to fostering professional relationships with researchers and engineers across various scientific fields including materials science, physics, chemistry, biological sciences, semiconductors, and data storage. Park Systems' mission is to drive nanoscale innovations for scientists and engineers, facilitating scientific discoveries. Their clientele includes leading semiconductor companies and research universities worldwide. For more details, visit www.parksystems.com.