#South Korea #Daejeon #Tomocube #HT-T1D #3D Defect Analysis

Tomocube Launches the HT-T1 Desktop for 3D Glass Substrate Defect Analysis

In a groundbreaking development for semiconductor packaging, Tomocube has introduced the HT-T1 Desktop (HT-T1D), a cutting-edge system designed for high-resolution, non-destructive analysis of glass substrates. This innovative holotomography system aims to improve the inspection and measurement workflows critical to the production of advanced packaging technology.

Revolutionizing Defect Detection

The HT-T1D is engineered to address the complex challenges manufacturers face when identifying micro-defects in glass substrates—critical components for high-performance computing applications like AI accelerators and High-Bandwidth Memory (HBM). Traditional inspection methods, such as automated optical inspection (AOI) systems, often fall short in detecting internal defects that occur during processes like laser drilling, etching, metallization, and singulation. The HT-T1D overcomes these limitations by reconstructing the 3D internal structure of glass substrates based on precise coordinates provided by conventional inspective tools.

The Technology Behind HT-T1D

Utilizing Tomocube's state-of-the-art visible light holotomography, the system visualizes the three-dimensional refractive index distribution within glass substrates with remarkable sensitivity of $10^{-4}$. This non-destructive measurement capability allows users to repeatedly examine the same area over various process stages. By analyzing how and when defects form and grow, manufacturers can make informed adjustments to their processes in real-time, significantly reducing downtime and enhancing production efficiency.

Accelerating Yield Learning

The HT-T1D is expected to drastically cut down analysis times from days or weeks to just minutes, thereby facilitating quicker interventions before costly downstream processes occur. This speed is essential for businesses aiming to maintain production stability in an increasingly competitive market. As YongKeun Park, CEO of Tomocube, stated, "The HT-T1D goes beyond merely detecting defects; it assists customers in identifying root causes and refining process conditions to optimize yield learning and enhance overall production reliability."

Additional Innovations: TAMI Software Platform

Alongside the hardware, Tomocube has also unveiled TAMI, a dedicated 3D analysis software platform for inspection and measurement. TAMI quantitatively analyzes 3D refractive index volume data, generating structured reports for technical review and facilitating a seamless workflow from finite element inspection (FE) to in-line verification. This innovative system is designed to support partnerships with system integrators, ensuring consistent data processing in compatible formats.

Broadening Application Scope

This platform's versatility isn't limited to wafer packaging; it's adaptable for photonically integrated glass substrates utilized in Co-Packaged Optics (CPO), where refractive index directly influences component performance. Tomocube's expansion into these adjacent markets further showcases the system's flexibility, positioning the company as a leader in non-destructive inspection and metrology.

Tomocube's ongoing commitment to developing advanced solutions for glass substrate inspection underpins its strategy to collaborate closely with manufacturers, advanced packaging companies, and system integrators. The launch of the HT-T1D marks a significant step in meeting the rising global demand for innovative technologies in semiconductor packaging and will shape the future of defect detection and analysis.

Conclusion

As the semiconductor industry evolves, so too must its tools. Tomocube's HT-T1 Desktop represents not just a technological advancement but a paradigm shift in how manufacturers approach defect identification and process refinement, underscoring the necessity of integrating advanced metrology into standard manufacturing practices. With continued innovation and strategic partnerships, Tomocube is poised to lead the charge in achieving higher yield rates and production robustness in glass substrate manufacturing.