Imec Achieves First Large-Scale Solid-State Nanopore Wafer Production Using EUV Lithography

Imec’s Revolutionary Step in Nanopore Production

Imec, a global leader in semiconductor research and innovation, has recently achieved a significant milestone in the production of solid-state nanopores. They successfully demonstrated the first manufacturing at wafer scale using Extreme Ultraviolet (EUV) lithography on 300mm wafers. This breakthrough transforms nanopore technology from a laboratory concept into a scalable platform for biosensing, genomics, and proteomics.

The Impact of Solid-State Nanopores

Nanopores are small openings that allow scientists to analyze molecules such as DNA and proteins. Historically, producing solid-state nanopores in bulk has faced challenges concerning variability and integration. However, Imec's recent advancement signifies a substantial leap in achieving high-performance biosensor arrays that leverage Complementary Metal-Oxide-Semiconductor (CMOS) technology. This innovation could accelerate personalized medicine, enable rapid diagnostics, and facilitate molecular data storage.

An impressive feature of this process is the ability to create nanopores as small as 10 nm across with remarkable uniformity across the entire wafer. Furthermore, there is potential for refining pore sizes below 5 nm, which could enhance performance even further.

High Signal-to-Noise Ratio Revealed

In the characterization of electric and biomolecular translocation through the nanopores, Imec measured a high signal-to-noise ratio of 6.2. This metric underscores the technology's potential for precise molecular detection, making it an asset in modern biomedical applications.

Ashesh Ray Chaudhuri, the lead author and project manager at Imec, stated, “Imec is uniquely positioned to make this leap. We can apply EUV lithography, typically reserved for memory and logic applications, to life sciences. Utilizing our lithographic infrastructure, we’ve demonstrated that solid-state nanopores can be manufactured at scale with the necessary precision for molecular detection.”

Broader Implications and Future Directions

This remarkable progress opens the door to high-performance biosensor arrays that could significantly improve healthcare applications, among others. The implications of such advancements extend beyond just nanotechnology—they reach into vital sectors including health, automotive, energy, and agriculture. Imec’s pioneering research continues to drive innovations across a multitude of industries, showcasing the versatility and efficiency of modern semiconductor technologies.

About Imec

Imec stands at the forefront of semiconductor research and innovation. With a robust R&D infrastructure and a workforce of over 6,500 employees, Imec is committed to enhancing semiconductor technologies and scaling systems across a breadth of fields. The advancements pursued at Imec foster innovations in computing, health care, automotive, energy solutions, infotainment, industrial applications, and safety.

Imec collaborates closely with global leaders throughout the semiconductor value chain along with technology companies, startups, academic institutions, and research organizations across Flanders and beyond. Based in Leuven, Belgium, Imec has research centers in Belgium, Europe, and the USA, representing its global reach. In 2024, the organization reported revenues exceeding 1 billion euros, reflecting its pivotal role in the industry.

For anyone interested in further details, more information can be found on Imec's website at imec-int.com.

In conclusion, Imec's successful fabrication of solid-state nanopores at a wafer scale marks a watershed moment that could redefine biosensing technologies and significantly impact various scientific and medical fields in the years to come.