#USA #Shrewsbury #Air Bearing Scanner #PI Physik Instrumente #Semiconductor Inspection

Unveiling PI's Advanced Air Bearing Scanner for Precision Wafer Inspection

PI's New Air Bearing Scanner Revolutionizes Precision Motion

In the realm of semiconductor manufacturing, precision and speed are paramount. At the forefront of this innovation is PI's newly unveiled air bearing scanner, the A-323, showcased at SEMICON West 2026. Designed and engineered in the USA, this cutting-edge tool aims to improve wafer inspection processes, optical metrology, and photonics applications, significantly enhancing throughput and precision.

Enhanced Precision and Performance

The A-323 features impressive specifications, including a travel range of 500 × 500 mm in the XY plane, with a velocity of up to 2 m/s and acceleration of 2 g. What sets this scanner apart is not only its speed but also how quickly it can begin processing after a halt. The new architecture allows for shorter step-and-settle times while ensuring better repeatability — essential for maintaining rigorous quality control in semiconductor fabrication.

This advanced scanner builds upon the existing A-322 model, integrating improved design features that enhance stability and performance. For instance, it redirects motor reaction forces into the machine frame rather than the granite base. This innovative approach reduces disturbances to the optics and sensors, which ultimately leads to higher quality results.

Three Design Innovations

The A-323 employs a split-beam cross-axis configuration that keeps the payload low and close to the motor force plane. This strategic design minimizes rocking during acceleration, decreasing the offset between the payload and the encoder measurement plane. Hence, it limits errors caused by angular motions—particularly vital at the edges of 300 mm wafers where slight yaw errors can translate into significant positioning inaccuracies.

Moreover, the increased distance between drive and encoder points offers greater control over vertical rotation. This control is especially crucial for detailed inspection processes requiring meticulous accuracy.

Customizable for Your Needs

A standout feature of the A-323 is its central pocket that accommodates various application-specific modules. Customers can integrate PI solutions or their equipment, whether it be a Z-tip/tilt stage, a rotary axis, or a combination of tilt and rotary units. This flexibility allows users to maintain optimal dynamic performance while catering to their specific workloads.

Additionally, PI’s newly developed air-bearing pucks contribute to a stiffer air film, improving resolution and stability during operation. Coupled with advanced mounting features like integrated cable tracks and pneumatic routing, the A-323 presents a simplified setup process, making it easier for users to configure their systems.

Scalability and Future Developments

The A-323's performance is largely dictated by the motor force and thermal management rather than the stage structure itself. With liquid-cooled motors effectively controlling heat, manufacturers can customize motor sizing based on payload requirements and operational conditions. This adaptability prepares the A-323 for evolving industry demands and emerging technologies.

Target Applications and Industries

The A-323 scanner is geared towards various applications within the semiconductor sector, including wafer and panel inspection, optical metrology, stealth slicing, and photonics alignment. Its high-performance characteristics make it suitable not only for industrial usage but also for extensive research and development in material processing.

Conclusion

Physik Instrumente (PI) continues to build on its legacy of excellence in precision motion systems with the launch of the high-performance A-323 air bearing scanner. This innovative tool emphasizes speed, precision, and flexibility, ensuring that it meets the high demands of today's semiconductor manufacturing and metrology environments. For more information or to discuss specific scanning requirements, interested parties are encouraged to reach out to PI's engineering team or visit their official website.