Imec Achieves First Successful Production of Solid-State Nanopores Using EUV Lithography

Imec's Groundbreaking Achievement in Nanotechnology



On December 9, 2025, Imec announced a significant triumph in the field of nanotechnology with the successful mass fabrication of solid-state nanopores on 300mm wafers utilizing extreme ultraviolet (EUV) lithography. This innovative leap transforms the concept of nanopores from theoretical laboratory experiments into a scalable platform with profound implications for biosensors, genomics, and proteomics.

Nanopores have long been heralded as a groundbreaking technology for genetic and protein analysis, yet until now, their mass production faced numerous challenges. Variability and integration difficulties with existing solutions had hindered the advancement of solid-state nanopores. With Imec's breakthrough, high-performance, CMOS-compatible biosensor arrays are now within reach, promising rapid developments in personalized medicine, quick diagnostics, and molecular data storage.

The nanopores fabricated by Imec measure to around 10 nanometers, demonstrating exceptional uniformity across the entire wafer. The production process holds promise for achieving pore sizes below 5 nanometers with further enhancements in integration techniques, an advancement that could elevate the performance and application range of these technologies significantly.

Characterizing the electrical properties and biomolecular translocation, Imec's solid-state nanopores exhibit a remarkable signal-to-noise ratio of 6.2. These advancements indicate that the team at Imec is not just at the forefront of nanotechnology but is also pushing the boundaries of what is achievable in molecular detection technologies.

"At Imec, we are strategically positioned for this developmental phase. We're applying EUV lithography, traditionally reserved for memory and logic applications, to biological sciences. Our use of lithographic infrastructure confirms that solid-state nanopores can be manufactured at scale with the precision necessary for molecular detection," stated Ashesh Ray Chaudhuri, lead author and project manager at Imec.

This newfound ability to create solid-state nanopores paves the way for high-performance biosensor matrices that can be used in healthcare and various sectors that require precise biological detection.

Collaborative Framework and Future Prospects


Imec is a global leader in research and innovation regarding advanced semiconductor technologies. The organization boasts modern research and development infrastructure and the expertise of over 6,500 employees driving innovations in semiconductor scaling, AI, silicon photonics, communications, and detection systems. Imec's research is facilitating breakthroughs across numerous industries, including computing, healthcare, automotive, energy, information and entertainment, manufacturing, agribusiness, and safety.

Through its IC-Link initiative, Imec guides companies through every stage of semiconductor design - from initial concept to full-scale production -, delivering tailored solutions to meet the most advanced design and manufacturing demands.

Moreover, Imec collaborates with global leaders in the semiconductor value chain, alongside tech firms, startups, academic circles, and research institutions in Flanders and worldwide. The organization is headquartered in Leuven, Belgium, with research centers across Belgium, Europe, and the USA, holding a prominent presence on three continents.

In 2024, Imec reported revenues of 1.034 billion euros, solidifying its position in the highly competitive tech landscape. This breakthrough in nanopore technology not only advances the frontiers of nanotechnology but also signifies a new era for biotechnological applications, laying the groundwork for transformative practices in the years to come.

For more information regarding Imec’s pioneering work, please visit Imec's website.

Topics Business Technology)

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