Imec Achieves Milestone in Nanotechnology with EUV Lithography Breakthrough

Imec's Groundbreaking Achievement in Nanopore Fabrication



In a remarkable advance for biotechnology and nanotechnology, Imec, a renowned research and innovation hub based in Leuven, Belgium, has achieved the first successful wafer-scale fabrication of solid-state nanopores utilizing EUV microscopy. This method is notable as it transforms nanopore technology from its traditional laboratory setting into a practical, scalable application suitable for a range of biosensing tasks, particularly in genomics and proteomics fields.

The Significance of Nanopores in Science


Nanopores serve as checkpoints for biomolecules as they traverse through a tiny hole, allowing for the real-time analysis of single molecules. This capability is revolutionary in both genomic sequencing and proteomic profiling. Thus far, however, manufacturers have faced challenges in creating solid-state nanopores on a mass scale. Imec's latest accomplishment addresses these hurdles by delivering a process that not only ensures precision in nanopore size – down to approximately 10 nm – but also maintains uniformity across expansive 300mm wafers.

Breakthrough Using EUV Lithography


The achievement is particularly significant as it employs EUV lithography, technology traditionally allocated for semiconductor memory and logic circuits. This adaptation represents a distinct leap forward by applying advanced techniques commonly used in chip manufacturing to the biosciences sector. According to Ashesh Ray Chaudhuri, the first author and RD project manager at Imec, this application signifies that innovative methods can indeed revolutionize life sciences: "By leveraging our lithography infrastructure, we’ve shown that solid-state nanopores can be fabricated at scale with the precision needed for molecular sensing."

Implications for Medicine and Diagnostics


The implications of this breakthrough are vast. The capability to produce nanopores at scale paves the way for the development of high-throughput biosensor arrays, which could significantly accelerate the implementation of personalized medicine, rapid diagnostics, as well as molecular data storage. With a signal-to-noise ratio of 6.2, Imec's nanopores demonstrate exceptional performance in electrical and biological characterization, making them ideal candidates for integrative diagnostic tools.

Future Prospects


Imec's research promises further advancements, aiming to shrink the pore sizes even below 5 nm with enhanced process integration techniques. As the advantages of solid-state nanopores are recognized, researchers believe they will usher in a new era of precision medicine, where diagnostics and treatments can be tailored to the individual nature of patients.

The firm’s reputation as a world leader in semiconductor technologies backs this ambition. With a skilled workforce exceeding 6,500 employees and revenues reported at €1.034 billion in 2024, Imec is at the forefront of innovation, driving breakthroughs across computing, health, energy, and more. Their state-of-the-art research facilities are spread across Europe and the USA, showcasing a strong commitment to collaboration with global leaders in the semiconductor industry, technology firms, academic institutions, and researchers across multiple sectors.

For more details on Imec's groundbreaking research in solid-state nanopores and further updates, visit Imec's official site.

Imec's pioneering work with EUV lithography not only marks a significant milestone in the field of nanotechnology but also reinforces the role of cutting-edge technologies in revolutionizing scientific research and healthcare applications.

Topics Business Technology)

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