#United States #Albany #Axcelis Technologies #Semiconductor Industry #ASMC 2025

Axcelis Technologies to Participate in ASMC 2025

On April 24, 2025, Axcelis Technologies, Inc., a prominent supplier in the semiconductor industry, announced its role as a sponsor for the upcoming Advanced Semiconductor Manufacturing Conference (ASMC). This key event will take place from May 5-8, 2025, at the Hilton Albany in Albany, New York, bringing together leading figures from various sectors of the semiconductor manufacturing community, including manufacturers, equipment suppliers, and academia.

At ASMC 2025, Axcelis is set to contribute significantly to the dialogue on manufacturing challenges by participating in a dedicated session focused on contamination-free manufacturing practices. Dr. Phillip Geissbuhler, a Staff Scientist at Axcelis, will lead a presentation on Particle Control for Low-Energy Boron Implantation within Session 5, slated for May 6 at 3:40 PM. This presentation will delve into the findings of a collaborative study aimed at reducing particulate contamination during the ion implantation process, particularly for low-energy boron applications.

The study highlights how innovative hardware can minimize particles that unintentionally adhere to wafers during the implantation process. By altering the ion beam angle of incidence on the beamline components, this new technology promotes self-sputtering, thereby reducing the build-up of boron films. This is a critical factor in preventing delamination, which could otherwise become a source of contamination leading to decreased device yields. Such advancements are crucial for ensuring manufacturers maintain high-quality production standards, especially in an industry where performance and reliability are paramount.

Russell Low, CEO of Axcelis, expressed enthusiasm about the opportunity to share their expertise at ASMC 2025: "We’re pleased to be part of ASMC 2025 and particularly excited about presenting our work on contamination control. This research stems from a technical collaboration with a leading device maker. Our deep technical expertise allows us to offer insights and recommendations that facilitate optimized device performance and yield for chipmakers."

Founded in Beverly, Massachusetts, Axcelis has over 45 years of experience delivering innovative and highly productive solutions tailored for the semiconductor industry. The company specializes in the design, manufacture, and life cycle support of ion implantation systems, which are essential in the integrated circuit (IC) manufacturing process. Axcelis continually strives to elevate process applications, thereby playing an integral role in advancing semiconductor technology.

To learn more about Axcelis Technologies and their latest innovations, visit their official website at www.axcelis.com. For media inquiries, you can reach out to Maureen Hart, Senior Director of Corporate Marketing Communications, at (978) 787-4266 or email her at [email protected] Additionally, interested parties can contact David Ryzhik, the Senior Vice President of Investor Relations and Corporate Strategy, at (978) 787-2352 or via email at [email protected]

ASMC 2025 promises to be a pivotal gathering for professionals seeking solutions to the complex challenges of semiconductor manufacturing. With contributions from industry leaders like Axcelis Technologies, the conference is set to deliver actionable insights and foster collaboration among key stakeholders in the semiconductor ecosystem.