Imec Achieves Breakthrough in Wafer-Scale Solid-State Nanopore Manufacturing with EUV Lithography

Imec's Groundbreaking Development in Nanopore Technology

In a remarkable advancement for nanotechnology, Imec has announced the successful production of solid-state nanopores at wafer scale using Extreme Ultraviolet (EUV) lithography. This cutting-edge achievement, conducted on 300mm silicon wafers, marks a significant transition of nanopore technology from the laboratory to a scalable platform for applications in biosensing, genomics, and proteomics.

For quite some time, nanopores have been heralded as transformative tools in genomic and proteomic research. However, their production was hindered by variability and integration challenges, making mass manufacturing improbable. Imec's breakthrough now lays the groundwork for the development of high-performance biosensor arrays compatible with complementary metal-oxide-semiconductor (CMOS) technology. Such sensors hold the potential to expedite personalized medicine, rapid diagnostics, and molecular data storage.

The nanopores manufactured herald a size of approximately 10 nm, showcasing high uniformity across the wafer. This manufacturing method holds promise for achieving pore sizes of less than 5 nm with additional enhancements. Characterization of electrical and biomolecular translocation revealed an impressive signal-to-noise ratio of 6.2, indicating the efficacy of this technology.

Ashesh Ray Chaudhuri, the first author and R&D project manager at Imec, elaborated on this development, stating, "Imec is uniquely positioned to make this leap. We can apply EUV lithography — typically reserved for memory and logic chips — to the biological sciences. By leveraging our lithographic infrastructure, we have demonstrated that solid-state nanopores can be manufactured at scale with the precision needed for molecular sensing. This unlocks the door to high-capacity biosensor fields for healthcare and beyond."

The production of these nanopores signifies a shift towards scalable, high-precision biosensor applications, transforming early trials into viable products that could reshape sensitive diagnostic equipment in medical settings.

Imec's Vision for the Future of Technology

Imec is at the forefront of global research and innovation in advanced semiconductor technologies. With state-of-the-art R&D infrastructure and a skilled workforce of over 6,500 professionals, Imec propels innovation in semiconductor scaling, artificial intelligence, silicon photonics, connectivity, and sensor technologies.

The company’s advanced research efforts lead to groundbreaking discoveries across diverse sectors, including computing, healthcare, automotive, energy, infotainment, industrial applications, agritech, and security. Through its IC-Link program, Imec guides companies through every stage of chip development — from concept to mass production — providing tailored solutions that meet stringent design and manufacturing requirements.

Collaborating with global leaders throughout the semiconductor value chain, as well as tech companies, startups, and research institutions, Imec fosters innovation across Flanders, Europe, and worldwide. Headquartered in Leuven, Belgium, with research facilities in several countries, Imec recorded revenue of 1.034 billion euros in 2024, underscoring its impact within the industry.

For further information on Imec’s advancements and initiatives, visit their website at www.imec-int.com.

In conclusion, Imec's pioneering fabrication of solid-state nanopores sets the stage for a revolution in biosensing applications, ushering in new possibilities in healthcare technologies and improving molecular data handling capabilities.