Imec Achieves Breakthrough in Wafer-Scale Solid-State Nanopore Fabrication Using EUV Lithography

Imec's Revolutionary Step in Nanopore Technology

On December 9, 2025, Imec announced a significant advancement in the field of biosensor technology with the successful wafer-scale fabrication of solid-state nanopores utilizing EUV lithography on 300mm wafers. This pioneering approach converts nanopore technology, previously confined to laboratory settings, into a scalable platform with immense potential in biosensor applications, genomics, and proteomics.

Traditionally viewed as a groundbreaking innovation, nanopores have faced manufacturing challenges due to variability and integration issues that hindered their mass production. Imec's success marks a turning point by enabling the creation of CMOS-compatible biosensor arrays that promise to enhance personalized medicine, rapid diagnostics, and molecular data storage. The manufacturing process facilitates the production of nanopores approximately 10 nanometers in size, and further improvements in process integration techniques could lead to pore sizes below 5 nanometers.

In the recent evaluations of electrical and biomolecular translocation, Imec found a high signal-to-noise ratio of 6.2, solidifying the effectiveness of their newly developed technology. “Imec is uniquely positioned to make this leap. By applying EUV lithography, which has mainly been reserved for memory and logic functions, to the biosciences sector, we have validated that solid-state nanopores can be manufactured at a large scale with the precision required for molecular sensing,” commented Ashesh Ray Chaudhuri, the lead author and project manager at Imec. “This innovation opens the door to high-throughput biosensor arrays for healthcare and beyond.”

The Significance of Solid-State Nanopores

Solid-state nanopores are regarded as transformative in parsing through genomic and proteomic data rapidly and efficiently. Unlike traditional biological nanopores, which are often limited by their natural variability, solid-state options provide consistent performance and manufacturability. This leap can lead to breakthroughs in various scientific domains, allowing healthcare providers to tailor specific treatments to individuals based on their genetic makeup and biological markers.

A New Era of Biosensing

With Imec's advancements, biosensor arrays compatible with complementary metal-oxide-semiconductor (CMOS) technologies will enable higher throughput and more reliable testing methods. This could revolutionize how diagnostics are performed, reducing costs and turnaround times for essential health tests. The capability to utilize large-scale manufacturing means that these devices could soon be used more broadly in clinical and research settings.

Overview of Imec

Operating from Leuven, Belgium, Imec stands as a leading research and innovation hub specialized in advanced semiconductor technologies. Its cutting-edge facilities and expertise from over 6,500 employees drive innovation across various sectors such as computing, healthcare, automotive, energy, and agriculture. Through IC-Link, Imec also supports companies in every phase of chip development, from conceptualization to mass production, delivering unique solutions tailored to demanding design and production needs.

Emphasizing collaboration, Imec works with major players in the semiconductor industry, tech firms, startups, and academic institutions worldwide. In 2024, the organization reported revenues of 1.034 billion euros, underscoring its vital role in the global tech landscape. For more information about Imec and its pioneering technologies, visit www.imec-int.com.