#United States #Semiconductor #Beverly #Axcelis #IIT 2026

Axcelis Technologies Steps Up as Platinum Sponsor for IIT 2026

Axcelis Technologies, Inc. (NASDAQ: ACLS), a prominent provider of ion implantation solutions for the semiconductor industry, is gearing up for a significant role at the upcoming International Conference on Ion Implantation and Annealing Technology 2026 (IIT 2026). This event, marking its 25th edition, will be held from September 20 to 24, 2026, at the Congress Center Villach in Austria. As a platinum sponsor, Axcelis is not only showcasing its commitment to innovation but also its leadership in the industry.

The IIT 2026 conference brings together experts from around the world to examine the latest advancements and challenges in ion implantation and annealing. Participants will delve into topics like implant/doping processes, device application improvements, equipment advancements, metrology practices, and modeling implications. Axcelis is setting the stage for impactful discussions and opportunities during this biennial event, which focuses on tackling both current issues and future trends in semiconductor manufacturing.

Innovation on Display

Axcelis will have a significant presence at the conference, featuring an exhibit at Booth #7. Here, attendees will gain insights from Axcelis' team of technologists and collaborators who will present groundbreaking developments in the following areas:

Implant Innovation

• - Purion XEmax™ for SiC Superjunction MOSFETs
• - Purion H6™ Next Generation High Current Implanter
• - Techniques to improve SiC MOSFET Within-Wafer Implant Uniformity via an Integrated CIP
• - Remote Vaporizer technology for Aluminum Implantation in SiC

Enabling SiC Manufacturing Excellence

• - The influence of Stacking Density on SiC Implant Profiles
• - High-Energy Aluminum Channeling Implant Characterization
• - Enhancements in Aluminum Ion Implantation Beam Current performance

Advancements in Implant Platforms

• - Real-time Beam Shape Monitoring technologies
• - Systems for Beam Energy Measurement
• - Innovations on Wafer Backside Particle Reduction
• - Development of Low-Cost High Current Metal Ion Sources

Exploring Emerging Research

• - Engineering of Contact Modules aimed at Advanced CMOS Nodes
• - Investigation of Resonator Devices
• - Neutron Spectroscopy applications in light ion nuclear reactions

Russell Low, President and CEO of Axcelis Technologies, expressed the company's enthusiasm for being a platinum sponsor. He stated, "We are proud to support IIT 2026 as a platinum sponsor. Our commitment is to empower customers with enabling technologies and support solutions that ensure the purity, precision, and productivity crucial for the upcoming semiconductor devices."

Register for IIT 2026

For those interested in attending IIT 2026, more information and registration details can be found on the conference website: IIT 2026. Axcelis invites all stakeholders in the semiconductor space to join in on what promises to be an enlightening and forward-looking conference.

About Axcelis Technologies

Based in Beverly, Massachusetts, Axcelis Technologies has contributed its expertise to the semiconductor industry for nearly five decades. The company is dedicated to designing, manufacturing, and providing comprehensive life cycle support for ion implantation systems—an essential aspect of integrated circuit production. Discover more about Axcelis and its pioneering solutions at www.axcelis.com.