#Japan #Tokyo #Ushio Electric #UX-45114SC #Wafer Exposure

Ushio Electric Introduces the New UX-45114SC

Ushio Electric, headquartered in Tokyo and led by CEO Takafumi Asahi, has officially announced that it will start accepting orders for its latest wafer exposure system, the UX-45114SC, in the first quarter of 2026. This new model is designed to accommodate 6-inch and 8-inch wafers, achieving a resolution of L/S = 2.8μm along with enhanced overlay accuracy.

This innovative product is the latest addition to Ushio's well-regarded UX-4 series, which has a proven track record in improving production efficiency for devices used in power semiconductors, MEMS sensors, and optoelectronic fusion (optical semiconductors).

In recent years, the semiconductor industry has seen an increasing demand for high-performance devices, prompting advancements in miniaturization. Additionally, there has been a trend towards larger wafer diameters to enhance chip production efficiency, particularly moving towards 6-inch and 8-inch sizes. To meet these evolving needs, Ushio has relied on its unique optical design technology, combining it with a specialized optical microscope that sets it apart from traditional models. This synergy has allowed for the successful development of the UX-45114SC, which ensures high throughput while maintaining resolution and overlay accuracy, enabling a production yield on par or better than previous models.

The improved features of the UX-45114SC are crucial for the production of next-generation electronic devices essential for advancements in IoT, 5G, and mobility. The model maintains high throughput while delivering enhanced resolution and overlay precision, leading to significant productivity and yield improvements.

Ushio Electric remains committed to being a leading company in the field of wafer exposure systems. The firm aims to contribute to a more convenient and comfortable society through the advancements of light-based technology.

From December 17 to 19, the UX-45114SC will be showcased at the Tokyo Big Sight during the SEMICON Japan 2025 event (Booth No. E4522).

Key Features of UX-45114SC

• - Mask Damage-Free Exposure: High productivity at 120 WPH.
• - Deep Focus Depth: Ability to expose 3D surface shapes and thick-film resists.
• - Automation Support: Compatible with inline, online, OHT, and AGV systems.
• - Resolution of L/S = 2.8μm: Ensures high accuracy in production.
• - Improved Overlay Accuracy: Enhances the reliability of layered components.
• - Mercury-Free and LED Light Source Compatible: Environmentally friendly design.

The appearance and specifications of the system are subject to change without notice. Depending on filter selection, users can choose between combinations of resolution and depth of focus (DOF), offering options for 'Resolution 2.8μm, DOF ±10μm' or 'Resolution 3μm, DOF ±20μm'.

About Ushio Electric

Founded in 1964 and listed on the Tokyo Stock Exchange (Stock No. 6925), Ushio Electric specializes in manufacturing and selling a wide range of light sources, including those ranging from ultraviolet to visible and infrared. The company also produces optical and imaging equipment that integrates these light sources. Ushio holds a significant market share in various electronics sectors such as semiconductor manufacturing, flat-panel displays, and electronic components. Recently, it has also expanded into life sciences sectors including medical and environmental applications.

For more information, visit Ushio's official website.