#Germany #Garching #SUSS MicroTec #GreenTec Solutions #GT200

SUSS MicroTec Enters the Wafer-Cleaning Market

SUSS MicroTec SE, a prominent supplier in the semiconductor industry, recently announced its strategic entrance into the wafer-level cleaning market with the launch of its GreenTec Solutions product line, featuring the first system, the GT200. This initiative represents a pivotal step as it taps into a rapidly expanding market valued at approximately €5.4 billion and driven by the accelerating demand for advanced packaging applications and high-performance computing.

Sustainable Cleaning Technologies

SUSS's GreenTec Solutions stand at the forefront of sustainable wafer cleaning technology, addressing a growing need within the semiconductor sector for environmentally friendly processes. The innovative solution significantly reduces chemical consumption and eliminates the use of hazardous acids. By integrating advanced technology with sustainability, SUSS aims to align its offerings with the environmental, social, and governance (ESG) goals of the industry.

At the core of GreenTec Solutions are the proven TurbulenStrip™ and CrustBuster™ technologies, both integral to the company’s legacy in photomask processing. These technologies work in tandem to provide an efficient approach to resist and residue removal. TurbulenStrip™ employs a lower-impact batch soaking method alongside single-wafer handling, while CrustBuster™ utilizes patented in-situ UV technology that breaks down and removes organic debris directly at the wafer surface. This hybrid cleaning method enhances efficiency, improves process stability, and allows clients to pursue their sustainability targets while also decreasing overall costs.

Focus on Innovation and Collaboration

The GT200, designed specifically for 200 mm manufacturing operations, targets various applications such as MEMS, RF devices, power devices, and CMOS technology. SUSS not only focuses on equipment provision but also fosters collaboration through joint evaluation programs, process co-development, and recipe optimization services. These initiatives help customers substantially shorten adoption cycles, enhance process stability, and mitigate risks associated with technology transfers, particularly prior to scale-up for high-volume production.

As part of its strategic roadmap, SUSS aims for high modularization and standardization in all GreenTec platforms. The GT200 marks the beginning of a series of scalable solutions, with plans to introduce a dedicated 300 mm high-volume manufacturing (HVM) platform by 2027 and a subsequent 200 mm HVM model by 2028. This strategy is intended to provide a clear transition path from evaluation to full-scale production for customers leveraging these advanced cleaning solutions.

Commitment to Sustainable Microelectronics

In his commentary, Burkhardt Frick, CEO of SUSS, indicated that the introduction of GreenTec Solutions is a significant milestone within the company’s Ambition 2030 strategy. He emphasized that entering the wafer-level cleaning sector is not only a means of achieving significant long-term growth potential but also a commitment to sustainability within semiconductor manufacturing.

Yuta Nagai, Senior VP of Photomask Solutions at SUSS, spoke about their vision for future semiconductor manufacturing, stating, "We are building on decades of experience in demanding photomask applications and transferring this expertise now into eco-friendly wafer-level manufacturing. Together with customers and partners, we develop process solutions that support the next generation of microelectronics with a clear focus on reliability, innovation, and responsible resource use."

Experience SUSS at SEMICON West

As SUSS MicroTec rolls out these transformative solutions, industry professionals can learn more about them at SEMICON West, where the company will participate in Product Deep Dives, showcasing the latest in wafer-level cleaning innovations.

In a landscape where environmental considerations are driving change, SUSS MicroTec’s GreenTec Solutions mark a promising advancement in semiconductor technology, fostering sustainable manufacturing practices while maintaining a focus on cutting-edge performance.

For more information on the GT200 system, visit SUSS MicroTec GreenTec Solutions.