#South Korea #Busan #Axcelis Technologies #Purion Power Series+ #ICSCRM

Axcelis Technologies to Showcase Innovations at ICSCRM 2025

Axcelis Technologies, Inc. (NASDAQ: ACLS), recognized as a leading provider of ion implantation solutions pivotal to the semiconductor industry, is gearing up for an impactful presence at the International Conference on Silicon Carbide and Related Materials (ICSCRM 2025). This significant event will unfold from September 14 to 19, 2025, at the Bexco Convention Center in Busan, South Korea.

During this prestigious gathering, Axcelis is set to unveil its new Purion Power Series+™ and GSD Ovation ES platforms. These innovations are specifically engineered to enhance device capabilities and improve productivity for next-generation power devices, catering to both single wafer and batch applications.

Dr. Russell Low, President and CEO of Axcelis, expressed enthusiasm for participating in this key forum, emphasizing its importance in the power semiconductor sector. He remarked, "We are particularly excited about presenting our advancements, a culmination of collaborative efforts with leading device manufacturers and research groups. Our expertise in silicon carbide technology is substantial, and we anticipate fruitful interactions with our customers, which will lead to the exchange of groundbreaking insights."

The ICSCRM 2025 event serves as an exceptional platform for industry professionals, researchers, and innovators. Axcelis' team of technologists is scheduled to present several notable topics during the conference's technical sessions:

• - Path for Superjunction Industrialization by Single Step High Energy Channeling Implant

Presented by Dr. Fulvio Mazzamuto, Axcelis Technologies

• - Development of High Energy Channeling Implantation Process for SiC Superjunction Devices

Presented by Dr. Reza Ghandi, GE Global Research

• - Effect of Silicon and Oxygen Pre-Implantation on Thermal Oxidation of 4H-SiC

Presented by Dr. Enrico Sangregorio, CNR IMM

These presentations highlight the innovative research behind silicon carbide technologies and their applications, showcasing Axcelis' commitment to advancing the semiconductor landscape.

As the semiconductor industry continuously evolves, Axcelis remains at the forefront, leveraging over 45 years of expertise in providing high-productivity ion implantation solutions. The company focuses on continuous improvement in process applications, design, manufacturing, and lifecycle support of these critical systems necessary for integrated circuit manufacturing.

About Axcelis Technologies

Headquartered in Beverly, Massachusetts, Axcelis has been a significant player in the semiconductor industry, delivering pioneering solutions that meet the complex demands of chip manufacturers. The firm’s dedication to innovation is evident in its extensive portfolio, which plays a crucial role in ensuring the performance and reliability of a vast range of semiconductor devices.

For additional details regarding the ICSCRM 2025 conference and to explore the range of technologies Axcelis will present, interested parties can visit the official conference website at icscrm2025.org.

In a world where semiconductor technology is crucial to progress across various industries, Axcelis continues to lead with innovative products designed for the present and future semiconductor challenges.