Imec's Breakthrough in Wafer-Scale Fabrication of Solid-State Nanopores Using EUV Lithography

Imec's Revolutionary Step in Nanopore Technology

In a remarkable advancement for the field of biosensing, Imec has successfully realized the first wafer-scale fabrication of solid-state nanopores using extreme ultraviolet (EUV) lithography on 300mm wafers. This milestone shifts nanopore technology from theoretical applications to a practical, scalable platform essential for various life sciences disciplines, including genomics and proteomics.

Transformative Potential of Nanopores

Nanopores have been recognized as revolutionary tools within genomics and proteomics; however, the challenge has always been their mass production. Prior to this achievement, solid-state nanopores faced obstacles due to variability and integration issues, limiting their widespread adoption. Imec’s innovation enables a shift towards high-throughput, complementary metal-oxide-semiconductor (CMOS)-compatible biosensor arrays, which may significantly accelerate advancements in personalized medicine, rapid diagnostics, and molecular data storage.

The technology demonstration reveals that it is now feasible to fabricate nanopores as small as approximately 10 nm with outstanding uniformity across the 300mm wafer. Furthermore, with ongoing improvements in processing technologies, there's a strong indication that pore sizes can be reduced to below 5nm. This finesse in fabrication showcases a high signal-to-noise ratio of 6.2 during electrical and biomolecular characterization, positioning this technology firmly at the forefront of research and application.

An Industry Leader's Perspective

“The leap taken by Imec exemplifies our commitment to pushing the boundaries of what’s possible. By employing EUV lithography—a method typically reserved for advanced semiconductor applications—we can now pivot our focus to life sciences,” stated Ashesh Ray Chaudhuri, the first author of the study and an RD project manager at Imec. “The success of this fabrication process opens new avenues for high-throughput biosensors in healthcare and beyond.”

His assertion reflects a broader vision where technology convergence fosters unprecedented improvements across multiple sectors.

The Future of Biosensing and Beyond

This groundbreaking technology not only has the potential to revolutionize medical diagnostics but also creates opportunities for advancements in various sectors. For instance, high-resolution nanopore-based sequencing technologies could redefine genomic medicine, enabling faster and more accurate DNA and RNA analysis. Similarly, in the field of proteomics, the ability to detect and analyze proteins with high precision can lead to breakthroughs in drug discovery and therapeutic development.

Moreover, this innovation paves the path for the integration of advanced sensing technologies in diverse applications such as environmental monitoring, food safety, and security, facilitating faster responses to health threats and other urgent challenges.

About Imec

Imec is globally recognized as a pioneer in semiconductor technology, boasting a robust infrastructure and a talented team of over 6,500 employees. The organization leverages its extensive expertise to drive innovation across multiple domains, including computing, health, automotive, energy, and more. With revenue surpassing €1.034 billion in 2024, Imec collaborates with leading firms across the semiconductor landscape and remains dedicated to pushing the frontiers of science and technology.

Conclusion

As Imec continues to break barriers in semiconductor fabrication and biosensing technologies, the implications of its advancements are profound. The successful integration of EUV lithography to create solid-state nanopores signals a new era in biotechnology, offering enhanced capabilities that could soon become integral to healthcare and various industries. For more detailed insights into Imec’s pioneering efforts, visit Imec's official website.