#Finland #Espoo #Semiconductor #Beneq Transmute #Atomic Layer Deposition

Beneq Unveils a Game-Changer in ALD Technology: The Beneq Transmute™

Beneq, recognized globally as a leader in the field of Atomic Layer Deposition (ALD) equipment and solutions, has recently announced the launch of the Beneq Transmute™. This cutting-edge ALD tool is tailored for high-throughput production environments, primarily targeting advanced semiconductor manufacturing. With a specialized focus on products like Wide Bandgap (WBG) power electronics, RF devices, μLEDs, and various unique semiconductors, Beneq Transmute™ aligns performance scalability with cost-efficiency in an innovative manner.

Revolutionizing Production with Atomic Precision

The Beneq Transmute™ is engineered to enhance the capabilities of its predecessor, the Beneq Transform® XP platform. Using a proprietary 3-step ALD approach, this new platform integrates three critical processes: plasma pre-treatment, plasma-enhanced ALD (PEALD), and thermal batch ALD. This combination provides the ability to create conformal, high-performance dielectric stacks characterized by atomic-level interface control, all while achieving impressive throughput rates.

One standout feature of the Beneq Transmute™ is its flow-uniform chambers for 25-wafer processing, which are coupled with advanced precursor dosing technologies. This configuration facilitates rapid cycle times and ensures optimal wafer coverage while minimizing precursor waste. As a result, users experience significantly reduced operational costs across a wide spectrum of semiconductor applications.

Lucas Monteiro, Beneq’s Head of Product, expressed enthusiasm about the launch, stating, "Beneq Transmute™ represents a major leap forward in making ALD a viable high-volume manufacturing option. By blending the precision characteristics of ALD with production throughput and scalability, we empower our partners to produce next-gen WBG and RF devices with unmatched quality and cost-effectiveness."

Customization for Diverse Production Needs

The Beneq Transmute™ incorporates a modular cluster architecture that accommodates a variety of production requirements. With a possibility for up to two transfer chambers and eleven different process module slots—including PEALD, Thermal, buffer, and preheaters—each system can be customized to meet specific customer demands and fabrication roadmaps, while remaining scalable for future developments.

This adaptability ensures that manufacturers can structure their systems based on current needs while being ready for any advancements in technology that lie ahead. The dedication to tailored solutions highlights Beneq's commitment to providing excellent service and support to the semiconductor industry.

Supporting Future Technologies

Beneq Transmute™ is timely, addressing pressing trends in the semiconductor market such as the electrification of transportation systems, the shift towards renewable energies, the rollout of 5G and RF communications, and the burgeoning data center and next-generation display industries. By merging atomic precision with high production throughput, Beneq positions itself as a pivotal technology partner in facilitating more efficient, interconnected, and sustainable ecosystems.

Overall, the arrival of the Beneq Transmute™ is anticipated to mark a significant shift in ALD technology, fostering advancements across numerous electronic sectors and enabling manufacturers to meet their goals with unprecedented efficiency and effectiveness. With this new platform, Beneq continues to uphold its reputation for quality and innovation in the increasingly critical field of semiconductor manufacturing.

For further information, reach out to Beneq’s Event and Communications Lead, Charlotte Bärlund, at [email protected]