Axcelis and GE Aerospace Collaborate to Innovate High Voltage Power Devices

Axcelis and GE Aerospace Join Forces for Superjunction Power Device Development

In an exciting collaboration, Axcelis Technologies, a leader in ion implantation solutions for the semiconductor industry, has announced a Joint Development Program (JDP) with GE Aerospace. This partnership is dedicated to the advancement of high voltage superjunction power devices, specifically those with operational capabilities between 6.5 to 10kV. The processes for these devices will be developed using Axcelis' cutting-edge Purion XEmax™ high energy implanter, which is renowned for delivering the industry's highest beam currents across a wide energy range of up to 15 MeV.

This initiative is part of a larger project called the 'Advanced High Voltage Silicon Carbide Switches', led by GE Aerospace within the framework of the Commercial Leap Ahead for Wide Bandgap Semiconductors (CLAWS) Hub at North Carolina State University. The project aims to enhance the performance of power switches utilized in crucial emerging applications.

Advantages of Silicon Carbide Technology

Silicon Carbide (SiC) wide bandgap semiconductors are becoming increasingly important due to their ability to operate at higher voltages, temperatures, and frequencies compared to traditional Silicon (Si) devices. This technology is particularly beneficial in the aerospace and defense fields, as it facilitates lower power consumption and enables more compact packaging for essential systems. Furthermore, high voltage wide bandgap semiconductors are anticipated to significantly impact emerging critical technologies, including artificial intelligence, quantum computing, autonomous vehicles, and enhancing the resilience of the power grid.

President and CEO of Axcelis, Russell Low, expressed his enthusiasm for this collaboration, stating, "We are proud to partner with GE Aerospace in this important effort, which has the potential to catalyze the adoption of superjunction technology. Our company is dedicated to supplying the equipment and process expertise necessary to support our customers' device roadmaps for superjunction technology."

The Purion XEmax high energy implanter from Axcelis offers unparalleled flexibility in energy ranges, optimizing the depth and concentration of the implanted materials. This versatility not only streamlines the process by reducing the number of steps needed but also excels in achieving implant depths of over 7 micrometers into aluminum.

GE Aerospace's Expertise in SiC Technology

With over three decades of experience, GE Aerospace has amassed a significant intellectual property portfolio in SiC technologies. Currently, they sell SiC-based electric power products through their Electrical Power business, which caters to the avionics and electrical systems in commercial aircraft and ground vehicles. Recently, their researchers have concentrated on SiC developments aimed at enabling flight operations under more extreme conditions, such as hypersonic travel and space exploration, thereby supporting advancements in electric propulsion systems.

Dr. Ljubisa Stevanovic, chief engineer at GE Aerospace Research, highlighted the importance of high voltage SiC power devices, stating, "These devices are critical enablers for a range of pivotal applications, including hypersonic travel, electric propulsion, and exploration of outer space. We are thrilled to team up with Axcelis for this initiative, thanks to their exceptional knowledge in ion implantation for SiC power devices and their leading-edge technology in Purion high energy ion implanters."

A Bright Future for Power Devices

As the collaboration between Axcelis and GE Aerospace unfolds, it promises to push the boundaries of high voltage power device technology, fostering innovations that could reshape industries reliant on semiconductor advancements. Together, they are set to pave the way for future technologies that resonate across multiple sectors, impacting not just aerospace and defense but also extending to commercial applications that require efficient and high-performing electronic components.

With such partnerships, the semiconductor industry is well-positioned to meet the rising demands of increasingly sophisticated technologies and applications, reaffirming its pivotal role in driving progress in modern society.