Rapidus Unveils Japan's First EUV Lithography System for Semiconductors

Rapidus Pioneers EUV Lithography in Japan

In a landmark development for the semiconductor industry, Rapidus Corporation has completed the installation of Japan's first NXE:3800E EUV lithography machinery, manufactured by ASML. This monumental event took place at the Innovative Integration for Manufacturing (IIM-1) foundry in Chitose, Hokkaido, which is currently under construction.

As the demand for cutting-edge semiconductors escalates, the implementation of EUV technology is essential for the production of advanced 2nm nodes. EUV lithography represents a crucial leap forward, as it allows for the formation of highly intricate semiconductor structures through an advanced optical system that utilizes a shorter wavelength of 13.5nm, well-suited for the current and future generations of chip manufacturing.

The delivery and installation of this EUV machinery, celebrated with a ceremony at Portom Hall in New Chitose Airport, signal a pivotal moment for Japan. This is the first instance of EUV lithography technology being used for mass semiconductor production in the country, establishing Rapidus as a key player in a critical growth sector. Japan aims to reclaim its status as a leader in semiconductor manufacturing, which has been challenged in recent years by fierce competition.

Rapidus has plans to complement the EUV lithography setup with other advanced manufacturing equipment and fully automated material handling systems within the IIM-1 foundry. These additions are designed to optimize the manufacturing processes necessary for 2nm GAA (gate-all-around) semiconductor technologies, ensuring efficiency at every stage of production.

Traditionally, semiconductor lithography has relied on ArF (193nm) immersion exposure. However, the industry is shifting towards EUV technology to meet the requirements of smaller transistor sizes. The EUV equipment utilizes innovative components such as reflective photomasks and mirror lenses that are engineered for precision, ultimately enhancing production capabilities. The TWINSCAN platform that has been integrated into the facility allows for separate alignment and scanning, boosting productivity.

Rapidus is on the cusp of launching its pilot line in April 2025. This new strategy will introduce a single-wafer process across all manufacturing stages, streamlining operations under a fresh semiconductor foundry service known as Rapid and Unified Manufacturing Service (RUMS). This service is part of their broader mission to expedite development cycles for semiconductor design and manufacturing.

In addition to manufacturing excellence, Rapidus Corporation is focused on fostering innovation and collaboration within the technology sector. By creating partnerships to drive advancements in semiconductor technology, Rapidus is positioning itself not only as a manufacturer but as a pioneering force in the industry.

The establishment of Rapidus represents hope for Japan's technological resurgence, aiming to create new industries and fulfill the growing demand for high-performance semiconductors that cater to various sectors including artificial intelligence, high-performance computing, and beyond.

As Rapidus Corporation embarks on this ambitious journey, it reflects a commitment to enhancing both industry standards and customer satisfaction through the latest semiconductor technologies. The future development of semiconductors is pivotal as globalization increasingly relies on these components, making Rapidus an exciting entity to watch in the coming years.

About Rapidus Corporation

Founded in August 2022 and headquartered in Tokyo, Rapidus Corporation concentrates on the research, development, design, manufacture, and sales of semiconductor devices and electronic components. With a capital reserve of 7,346 million yen (as of November 2022), Rapidus aims to create impactful solutions in semiconductor technology, ultimately contributing to the fulfillment and prosperity of society.

For media inquiries, you can reach Devan Gillick at Breakaway Communications at [email protected]