#United States #Fremont #Lam Research #UC Berkeley #nanofabrication

Lam Research Enhances Semiconductor Research at UC Berkeley

On April 16, 2025, Lam Research Corporation (Nasdaq: LRCX) made a significant contribution to the future of semiconductor technology by donating its state-of-the-art multi-chamber etching system to the Marvell Nanofabrication Laboratory at the University of California, Berkeley. This advanced etching system is designed to support research and development in next-generation chip technologies. Through this donation, Lam Research aims to empower researchers with cutting-edge tools crucial for fabricating nanoscale semiconductor devices used in a variety of applications, including consumer electronics, industrial technology, artificial intelligence (AI), and quantum computing hardware.

The Berkeley Marvell NanoLab serves as a hub for innovation, allowing access to advanced micro- and nano-fabrication technologies that are typically only available in sophisticated fabrication facilities. By enhancing this environment with Lam's latest etching system, the company aims to build upon its long-standing partnership with UC Berkeley, which has been foundational in promoting advancements in nanoscale science and engineering.

Vahid Vahedi, the Chief Technology and Sustainability Officer at Lam Research, expressed the company's belief in the importance of academia-industry collaboration. He stated, "We believe that academia-industry collaboration is crucial to driving the nanofabrication advancements needed for new generations of Specialty Technologies. Lam's donation will give UC Berkeley's NanoLab researchers the ability to work directly with an industry-proven semiconductor manufacturing system in their efforts to accelerate innovation and develop new, novel processes."

A Cutting-Edge System for Revolutionary Applications

The donated etching system features Lam's Kiyo® conductor and metal etch, Flex® dielectric etch, and advanced Syndion® GP deep reactive ion etch chambers, all integrated on a Lam 2300® platform. This comprehensive capability allows for the etching of a diverse range of materials required for next-generation semiconductor devices. Moreover, it paves the way for innovation in applications such as optoelectronics, photonics, sensors, and radio frequency (RF) solutions.

In tandem with the donation, Lam Research is also financially supporting foundational research initiatives within UC Berkeley's College of Engineering. The etching technologies provided by Lam will facilitate novel fabrication processes for integrated optical solutions, which include essential components like switches, waveguides, electro-optic modulators, and fiber coupling technologies. These optical elements are integral to the development of photonic integrated circuits and optical interconnects, solutions that are anticipated to play a pivotal role in optical communications, advanced AI hardware, data center infrastructure, and quantum information processing.

A Legacy of Support and Innovation

Tsu-Jae King Liu, the dean of UC Berkeley's College of Engineering, acknowledged Lam Research's ongoing contributions by stating, "We thank Lam Research for its many contributions over the years to UC Berkeley's Marvell NanoLab in support of research and innovation for nanofabrication technologies. Lam's latest donation gives our researchers and students access to wafer-processing capabilities rarely accessible outside of the most sophisticated semiconductor manufacturing facilities. I look forward to seeing Lam's advanced etching system enable new atomic-scale innovations for next-generation chips in the years ahead."

As a founding industry member of the Berkeley Emerging Technologies Research (BETR) Center, Lam Research remains committed to supporting semiconductor research and development at UC Berkeley, further emphasizing its role in advancing technological innovation.

About Lam Research

Lam Research Corporation stands as a global leader in providing groundbreaking wafer fabrication equipment and services to the semiconductor industry. Their technologies empower customers to fabricate smaller, more efficient, and high-performance devices, contributing to nearly every advanced chip currently being produced worldwide. Headquartered in Fremont, California, Lam Research operates globally, underscoring its commitment to engineering excellence and customer-centric solutions.

For more information about Lam Research and its solutions, visit www.lamresearch.com.

About UC Berkeley College of Engineering

The University of California, Berkeley's College of Engineering is renowned for its academic and research excellence. It consistently ranks among the top engineering colleges globally, further solidifying its position as a pioneering institution in mechanical arts, mines, and civil engineering since its inception in 1868. Today, the college offers 17 academic programs and is home to approximately 7,000 students and 240 faculty members, including many distinguished in their respective fields.