#Japan #Tokyo #Ushio Electric #Wafer Exposure #UX-4 Series

Ushio Electric Unveils Advanced LED-Powered Wafer Exposure Systems

Ushio Electric Co., Ltd., headquartered in Tokyo, has officially launched orders for the new LED-equipped systems of its UX-4 series, specifically the UX-44101SCB and UX-45114SCB models, starting July 2026. This innovation continues Ushio's long-standing tradition of providing high-performance exposure systems tailored for the semiconductor industry.

The UX-4 series is designed for mass exposure applications and has successfully enhanced production efficiency over the years. This series mainly caters to devices related to power semiconductors, MEMS (Micro-Electro-Mechanical Systems), and optical semiconductor intersections relevant to communication technologies.

In light of the increasing environmental regulations concerning the use and discharge of chemicals in the semiconductor industry, there has been a significant shift towards LED lighting in exposure equipment. However, one of the primary challenges has been the requirement for high exposure doses, particularly for certain layers. This requirement can lead to extended exposure times due to insufficient lighting output.

Addressing this issue, Ushio has leveraged its expertise in solid-state light source design, which has been cultivated since its establishment, to develop an LED light source unit that achieves illumination levels comparable to traditional mercury lamps. This unit will be integrated into the newly launched UX-44101SCB and UX-45114SCB systems, enabling higher throughput rates equivalent to that of the previous mercury technology.

The increasing demand for larger and more precise next-generation electronic devices, pivotal for the advancements in IoT (Internet of Things), 5G communications, and mobility solutions, necessitates high exposure doses in manufacturing processes like Bump and WLP (Wafer-Level Packaging). The new UX-4 series not only meets these needs but also significantly reduces the running costs by allowing immediate on/off switching of the light source, thereby increasing the longevity of the LEDs compared to traditional mercury lamps.

As a leading company in wafer exposure equipment, Ushio remains committed to contributing to creating a convenient and comfortable society through innovative light solutions. This commitment is reflected in the advanced features of the new devices, including:

• - Mass Exposure: High productivity with over 120 WPH, ensuring minimal mask damage.
• - Deep Focus Depth: Enables exposure to 3D surface shapes and thick resist layers.
• - Automation Ready: Compatibility with inline and online automation systems, including OHT (Overhead Transport) and AGV (Automated Guided Vehicle) systems.
• - Mercury-Free Operation: Utilization of LED light sources for a more eco-friendly approach.

Furthermore, users of the new UX-4 series will appreciate the flexibility and efficiency afforded by the new models, which promise to revolutionize various manufacturing processes across the semiconductor sector. As more industries adopt environmentally friendly technologies, Ushio Electric is positioned to lead the way in sustainable manufacturing practices.

Main Features

• - Mass exposure process with high throughput rates.
• - High focus depth for advanced 3D exposure capabilities.
• - Automatic system integration with leading transport technologies.
• - Environmentally friendly design with LED illumination.

With a solid foundation dating back to its establishment in 1964 and a strong presence in the optics, electronics, and life sciences industries, Ushio continues to innovate and expand its product offerings. The company is listed under Tokyo Stock Exchange number 6925 and maintains a commitment to excellence and sustainability in all its undertakings.

For more information, visit Ushio's official website: Ushio Electric.