Mass-Vac Launches Comprehensive Range of Vacuum Inlet Traps for ALD Applications

Mass-Vac Introduces Advanced Vacuum Inlet Traps for ALD Processes



Mass-Vac, Inc., a prominent player in vacuum technology, recently announced the launch of a comprehensive range of vacuum inlet traps specifically designed for Atomic Layer Deposition (ALD) processes. These traps are optimal for use in both research environments and full-scale production applications, catering to a wide variety of industrial needs.

The newly developed vacuum inlet traps are crafted from high-quality stainless steel and are available in multiple sizes, ranging from 4 inches to 16 inches in diameter. One of the significant innovations of this product line is the incorporation of interchangeable filter elements, allowing users to customize traps based on specific process requirements. This flexibility ensures that the traps can efficiently eliminate process byproducts from various precursors used in ALD, including compounds such as Trimethylaluminum (TMA), Titanium tetrachloride (TiCl4), Diethylzinc (DeZ), and Hydrogen sulfide (H2S).

Feature Highlights



Customization and Versatility


The Mass-Vac vacuum inlet traps are designed for easy customization. Users can opt for different filter elements, making these traps suitable for diverse applications. The options include:
  • - Stainless Steel Gauze: Ideal for trapping particulates.
  • - Activated Charcoal: Effective in adsorbing unreacted precursors.
  • - Sodasorb®: Utilized for acid neutralization, enhancing the quality of the vacuum.
  • - Sulfatreat®: Specifically designed for neutralizing hydrogen sulfide, crucial for processes involving toxic elements.
  • - Ammoniasorb: Targets ammonia and amines, addressing another critical aspect of chemical processing.

Product Variants


The product line features two main variants: the PosiTrap, available in 4-inch and 8-inch diameters, and the MultiTrap, offered in larger dimensions of 12-inch and 16-inch diameters. Each trap is engineered to meet rigorous operational standards, making them a reliable choice for both laboratories and manufacturing settings.

Economic Insights


In terms of pricing, Mass-Vac's vacuum inlet traps range from $390 to $5,750, depending on the specific configuration and features selected. This pricing structure ensures that options are available for both small-scale research operations and larger industrial applications. For businesses looking for tailored solutions, personalized price quotations can be requested directly from the company.

Contact and Further Information


To learn more about Mass-Vac's vacuum inlet traps or to inquire about specific needs, interested parties can reach out through the following channels:
  • - Contact Person: David Rolph, Marketing
  • - Address: 247 Rangeway Rd., P.O. Box 359, No. Billerica, MA 01862-0359
  • - Phone: (978) 667-2393
  • - Fax: (978) 671-0014
  • - Email: [email protected]
  • - Website: www.massvac.com

Mass-Vac continues to lead the market with innovative solutions that enhance ALD process efficiency and flexibility, ensuring that both research and production sectors can achieve their goals effectively. These vacuum inlet traps symbolize the company's commitment to quality, customization, and customer satisfaction.

Topics Consumer Technology)

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