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A-361: A Compact Solution for Precision Motion Control

In the realm of precision motion control, the A-361 air-bearing XY-rotation stage from PI (Physik Instrumente) emerges as an innovative and compelling choice for researchers and industrial applications alike. Standing at just 39.5mm tall and boasting a generous 200mm diameter motion platform, the A-361 is designed to meet the demands of ultra-high precision requirements in various fields such as semiconductor manufacturing and optical assembly.

High Performance in a Compact Design

The A-361 offers remarkable functionality with its three-axis motion capabilities, featuring 5mm of translational motion in both the X and Y directions, alongside a rotational capacity of 2° around the Z-axis. This versatility, combined with performance specifications that include minimum incremental motion of less than 30nm for linear movements and below 0.5µrad for rotation, underscores the stage's capability to handle the most stringent dimensional requirements.

Moreover, the calibrated positioning accuracy of ±0.2µm in X and Y, and ±5µrad in θZ, ensures that the A-361 can deliver consistent results and dependable performance, essential for critical measurement tasks. Bidirectional repeatability is also impressive, achieving 0.2µm in the XY plane and 4µrad rotationally, making it a top-tier choice for precision engineering tasks.

Applications in Advanced Manufacturing

The applications for the A-361 are extensive and varied. It is particularly well-suited for tasks such as wafer inspection, where enhanced precision is vital, as well as in flat-panel display metrology and fiber optics alignment. The non-contact design further adds to its appeal in semiconductor and photonics production, enabling precise alignment without introducing contaminants or mechanical wear.

Enhanced Stability and Durability

A standout feature of the A-361 is its frictionless air-bearing design, which allows for smooth motion without the wear associated with traditional bearings. This results in a substantial reduction in maintenance needs, extending the operational lifespan of the stage into the decades. The integrated position-locking mechanism adds further stability, effectively eliminating servo jitter during critical alignment tasks.

Incorporating a built-in vacuum chuck accommodates delicate wafers and other substrates, providing additional functionality for users engaged in semiconductor and optics applications. For those requiring an adaptable solution for various tasks, the A-361 can be combined seamlessly with the A-523 Z Tip/Tilt Stage, forming a comprehensive six-degree-of-freedom nanopositioning system.

Efficiency and Environmental Considerations

The operational requirements of the A-361 are minimal, requiring only dry, oil-free compressed air compliant with ISO 8573-1 purity standards. Its efficient air consumption rate of just 28L/min supports continuous operation, making it both an environmentally friendly choice and an economical investment for facilities concerned with operational efficiency.

Conclusion

PI’s introduction of the A-361 demonstrates a significant step forward in the field of precision motion control, combining compact dimensions with the high performance necessary for modern manufacturing and research applications. With its advanced features, including frictionless direct drives capable of generating substantial force, the A-361 stands ready to meet the challenges of today’s demanding environments. For industries ranging from semiconductor testing to advanced optical alignment, this stage represents a vital tool for achieving unprecedented levels of precision and control.

For further information, visit PI Americas or contact them directly at (508) 832-3456.