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Park Systems Expands FX Large Sample AFM Series for Next-Gen Industrial Applications

In an impressive move towards enhancing technology in the semiconductor industry, Park Systems has recently unveiled an expanded lineup of Large Sample Atomic Force Microscopes (AFM) at SEMICON Korea 2025. This new series aims to cater to the growing need for advanced industrial innovation, pivotal for the semiconductor sector’s evolution.

Introducing the FX300 and Advanced Features

The flagship model of the new lineup is the Park FX300, specifically designed for analyzing 300 mm wafers. This model is tailored for industries demanding high-precision analysis without overwhelming complexity, offering an accessible alternative for those not yet ready for a fully automated inline system. The FX300 is ideal for companies contemplating the implementation of AFM tools before transitioning to automated production lines.

Key Features of the FX300 Series

• - Sliding Stage: For accurate long-range flatness measurements of copper pads found in semiconductor processing.
• - Rotation Stage: Ensures precise sample alignment crucial for wafer-level packaging tasks.
• - Off-Axis Optics System: Enhances sample visualization, making analysis easier and more effective.
• - Fan Filter Unit (FFU): Provides a controlled environment to maintain cleanliness, which is essential in cleanroom operations.

Innovations in Nanoscale Chemical Analysis

Together with the FX300, Park Systems has also launched the FX200 IR and FX300 IR variants, elevating the capabilities of AFM technology into the realm of nanoscale chemical analysis. Integrating Fourier Transform Infrared Spectroscopy (FTIR) with AFM, these models leverage Photo-induced Force Microscopy (PiFM) that allows for chemical identification with exceptional spatial resolution of under 5 nm. This feature not only facilitates scrutiny of nanoscale structures but also safeguards wafer surfaces from damage, unlocking new avenues for material characterization across various fields, including semiconductors, polymers, and life sciences.

Versatility in Sample Analysis

The new IR models accommodate a range of sample sizes, up to 200 mm or 300 mm wafers, enabling high-resolution infrared spectral imaging. This addition provides remarkable insights into the composition and interactions at the molecular level, benefiting semiconductor defect analysis, polymer research, and advanced materials characterization with unparalleled precision.

Enhancing Efficiency in Measurement

Park Systems has crafted the FX Large Sample AFM series to enhance usability, reducing the necessity for manual intervention. Notable features include:

• - Automated Probe Recognition and Exchange: Streamlines setup processes and minimizes discrepancies in measurements.
• - QR Code System: Facilitates real-time monitoring of probe status, ensuring optimal performance.
• - AI-Driven Laser Alignment: Simplifies the alignment process, particularly in IR applications, allowing easier access to high-resolution chemical analysis.
• - StepScan™ Function: Promotes automation in sequential measurements across predefined coordinates, allowing for a myriad of topographical analyses with significantly reduced manual input.

Commitment to Industry Leadership

Dr. Sang-Joon Cho, Executive Vice President of Park Systems, highlighted the company’s dedication to leading technological advancements. He stated, “Our innovations represent decades of expertise in precision measurement and automation. The FX Large Sample AFM series is not just about tools, it’s about empowering industries with the technology required to revolutionize their approach towards nanoscience.”

By rolling out its latest innovations, Park Systems reinforces its status as a frontrunner in atomic force microscopy. The company continues to deliver state-of-the-art solutions that meet the dynamic demands of both the semiconductor industry and nanoscience research, paving the way for future advancements in the field.

About Park Systems Corp.

Park Systems Corp. is a renowned pioneer in nanometrology solutions, known for producing top-tier AFM instruments. With an unwavering commitment to developing professional relationships across various scientific domains, Park Systems engages with leading semiconductor firms and prestigious research institutions worldwide. The company, headquartered in Suwon, Korea, actively participates in global markets with regional offices in the Americas, Europe, and Asia. It is publicly traded on the Korea Stock Exchange (KOSDAQ). For additional information, visit www.parksystems.com.