Imec Achieves Milestone in Nanopore Technology
In a significant technological breakthrough, imec has successfully developed solid-state nanopores at a wafer scale using extreme ultraviolet (EUV) lithography on 300-millimeter wafers. This innovative feat transitions nanopore technology from a laboratory concept into a scalable platform poised for extensive application in the fields of biosensing, genomics, and proteomics.
Considered a game-changer in genomic and proteomic research, solid-state nanopores have faced considerable challenges in achieving mass production due to variability and integration difficulties. Imec's advancements pave the way for the development of high-performance, complementary metal-oxide-semiconductor (CMOS)-compatible biosensor arrays, which are anticipated to expedite personalized medicine, rapid diagnostics, and the storage of molecular data.
The production process demonstrated uniform nanopores ranging from approximately 10 nanometers across the entire wafer, showcasing the innovative capabilities of EUV lithography. Furthermore, the techniques have prospects for achieving nanopore sizes under 5 nanometers, with ongoing improvements in integration processes. Initial characterization of electrical and biomolecular translocation revealed a high signal-to-noise ratio of 6.2, highlighting the potential for precise applications in biomedical contexts.
"Imec holds a unique position to make this leap in technology. We are leveraging EUV lithography, traditionally used for memory and logic chip manufacturing, to drive innovations in biomedical technologies. Our lithographic infrastructure enables the large-scale production of solid-state nanopores with the necessary precision for molecular-level biosensors," stated Ashesh Ray Chaudhuri, a primary author and R&D project leader at imec. This advancement creates opportunities for creating high-performance biosensor matrices across various sectors, including healthcare.
About imec
Imec stands as a global leader in research and innovation within advanced semiconductor technologies. Harnessing its extensive R&D infrastructure and the expertise of over 6,500 staff members, imec advances innovations in semiconductor manufacturing scaling, systems, artificial intelligence, silicon photonics, communications, and sensors.
Through its pioneering research, imec contributes groundbreaking advancements across a multitude of industries such as computing, healthcare, automotive, energy, media, manufacturing, agriculture, food production, and security. With its IC-Link initiative, imec is committed to supporting companies at every stage of chip development—from initial concept to full-scale production—providing tailored solutions customized to meet the most advanced needs of design and manufacturing.
In collaboration with global leaders at all points of the semiconductor value chain, imec partners with technology companies, startups, academic institutions, and research organizations in Flanders and across the globe. Headquartered in Leuven, Belgium, imec operates research centers in Belgium, Europe, and the USA, with offices spanning three continents. In 2024, imec reported an impressive revenue of €1.034 billion. For further details, visit
imec's official website.